SCIPlasma - Quadrio Alpha

Quadrioα is a compact standalone plasma cleaning system suitable for substrates with a strip form factor. Capable of performing PE and RIE processes, the Quadrioα provides high uniformity and reliable results with a competitive throughput.

• Quadrioα comes in two versions:
  • Quadrioα4 with 4 tracks, 400 UPH*
  • Quadrioα5 with 5 tracks, 500 UPH*

• Both versions contain all subassemblies required for your plasma process:
  • A 13.56 MHz RF system inclusive of an automatic tuning network
  • Two mass flow controlled gas input lines
  • A dry vacuum pump contained in the body of the machine
  • A high precision capacitive pressure gauge
  • An all-aluminum chamber with no welded joints, nickel-coated for maximum performance
  • Two automatic doors
  • A PC controller with a fieldbus and an LCD touch screen user interface
  • An anti-jam system that protects the substrates, with automatic recovery function

APPLICATIONS

• Organic decontamination and surface activation of lead frames prior to wire bonding
• Adhesion promoter prior to molding
• Adhesion promoter of die attach materials on lead frames or PBGA strips
• Adhesion promoter for flip chip packages prior to underfill
• Flux removal from semiconductor packages or hybrids
• General activation, cleaning and decontamination