SCIPlasma - Aeon

TABLE-TOP BATCH PLASMA SYSTEM

Aeon is a compact standalone batch plasma cleaning system. It includes all the subassemblies necessary to deliver excellent cleaning and surface modification results. The features contained in this system allow a reliable and repeatable cycling of the plasma process to guarantee a smooth 24/7 operation.

• Aeon’s strength is its flexibility.This system comes with different configurations to best adapt to your plasma process’ needs. Its base configuration is complete with:
  • A 50 kHz or 13.56 MHz RF system
  • One mass flow controlled gas input line
  • A high precision capacitive pressure gauge
  • An all-aluminum chamber, nickel-coated for maximum performance
  • A manual door
  • A PLC controller with an LCD touchscreen user interface

APPLICATIONS

• Cleaning of copper lead frames prior to wire bonding
• Organic decontamination prior to wire bonding
• Adhesion promoter prior to molding
• Adhesion promoter of die attach materials on lead frames or PBGA strips
• Flux removal from semiconductor packages or hybrids
• General activation, cleaning and decontamination