Description
WSS3200 is designed for 8” wafer size handling. It comes with 2 SMIF Pod opener as load ports which allows wafer transfer and sort in between cassettes. The system used Hirata dual arm atmospheric wafer robot and come with a pre-aligner unit for accurate wafer transfer and wafer alignment. All wafer sorting modes can be easily selected by operation personal via recipe selection. OCR and barcode cassette modules are available as option for ease of operation and lot identification. The system available to build with host communication via SECS/GEM protocol that enable the total system integration.
Product Specifications
- Designed for 8” Wafer Handling
- Comes with 2x 8” SMIF Pod Opener Ports
- Comes with 2x Adapter for non-SMIF Pod Cassette Option
- Hirata 4-Axis Dual Arm ATM Robot with Build in Wafer Mapping Sensor
- Hirata Wafer Pre-aligner for Wafer Orientation Check and Wafer Alignment
- IOSS WID120 OCR Reader
- Programmable Sorting Method Include Wafer Selection Sorting, Sequential Sorting & Slot-to-Slot Sorting
- TCP/IP Network Interface or SECS/GEM Data communication (Optional)
- HEPA / ULPA Filter to Meet ISO Class 5 & 6 (Optional)
