Description
Ultra High Vacuum Oven
High Vacuum Oven features directly heated shelves that can be programmed to heat up to 300oC. The high vacuum chamber can easily pump down to 10-6 Torr, pumped by a turbo pump which is backed by a dry scroll pump (with no oil back-streaming to worry about). While it is very fast to heat up, the cooldown process can be slow (several hours). To preserve the interior surfaces from excessive oxidation, the chamber can only be vented once the shelves have dropped below 100oC. The chamber is vented with nitrogen. A partial vent is possible if you need to allow your sample to cool completely down to ambient temperature while in a nitrogen atmosphere. There are two approximately 11″ x 11″ (280 mm x 280 mm) shelves, and two custom made aluminum trays. It can bake eight 4″ wafers at a time. There are no windows, so light sensitive parts can be baked as long as they are wrapped in foil on the way into the chamber.
Features | Product
- Baking oxygen or water vapor sensitive polymer coatings in vacuum environment
- Baking out metal films without oxidizing the surface
- Low temperature metal contact annealing in high vacuum
- Drying out moisture from materials
- Driving off adsorbed water vapor from wafer surfaces
- Fully cross-linking polyimide under vacuum
- Baking assemblies which will go into other vacuum stations
- Flip chip solder reflowing
Product Parameters | Product
| Performances
|
Model | GZ-BDT-VC-01 |
| Temp. Range | 40-300ºC | |
| Pressure Range | 10-6 Torr | |
| Maximum Temp. Reach Time | About 20-30 minutes | |
| Form
|
Temp. Regulation Accuracy | ±1ºC |
| Internal Material | 1.5mm stainless steel plate full argon arc welding | |
| External Material | Cold rolled sheet, drug resistant coating on surface | |
| Heat-resistant Material | Glass fiber | |
| Heating Method | Direct heating of the pressure tank wall | |
| Total Power | 8.5KW | |
| Control Method
|
Program Operation and Status | 7-inch LCD touch screen control |
| Temp. Control Method | Multi-segment PID algorithm, temperature control accuracy ±0.1ºC | |
| Temp. Setting Method | Digital setup using dedicated operation function menu keys and up/down keys | |
| Operational Function | Fixed-value operation, programmed operation, auto-stop operation, auto-start operation | |
| Program Mode | Customizable upon request | |
| Additional Feature | Deviation correction function, key lock function, power failure compensation function | |
| Heater Loop Control | SSR driver + PIH | |
| Sensor | PT100 Thermocouple | |
| Safety Equipment | Self-diagnostic circuit (temperature sensing abnormality, heater disconnection, automatic overshoot prevention, SSR short circuit) Overshoot prevention, leakage protection switch for overcurrent, key lock function | |
| Sizes
|
Internal Size(H*W*D/mm) | 320*320*320mm, shelf size (280*280)mm |
| Power Current | AC380V 23A(50Hz/60Hz) | |
| Weight | About 426KG | |
