Description
Juno is a flexible, standalone batch plasma cleaning system. It can be used consistently in a manufacturing environment to clean and activate the surface of oddly shaped parts.
Juno‘s plasma chamber design includes simple shelves that can be arranged at different heights to allow multiple products sizes. Each shelf can be either:
-
connected to the RF signal to deliver a RIE (Reactive Ion Etching) plasma process or,
-
grounded to deliver a PE (Plasma Etching) plasma process
This allows to carefully select the plasma energy levels and treat sensitive products.
Juno has a specific gas distribution system that allows optimal gas flow and plasma reach inside complex geometries that may occur in the products to be treated.
In manufacturing, Juno can be used for:
-
Plasma cleaning before wire-bonding on modules
-
Plasma cleaning before transfer molding on modules
-
Plasma cleaning before under-fill
-
Plasma cleaning on PCBs, BGA substrates
Give its simple shelves design, it can also be used effectively for laboratory applications such as:
-
Plasma cleaning of generic parts for surface cleaning and activation for organic contamination removal
-
Plasma cleaning before coating processes (PVD, CVD, electroplating, Atomic Layer Deposition (ALD), dip coating, spin coating…)
-
Plasma cleaning before paint application
-
Plasma activation and functionalization of plastic materials (PE, PP, PDMS…)
-
Thin-layer oxide removal on metal parts
Juno’s versatility extends to a wide range of applications within the Semiconductors, Automotive and Electronics industries.
Product Specifications
Machine type – Standalone batch plasma cleaner
Footprint – 905W x 1155L x 1988H mm
Plasma chamber configuration – 4 shelves with 4 couples of powered electrode and ground electrode
Max product size – 393W x 354L x 382H mm
Min product size – N/A
Plasma generator – 600W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines – 2 Process gas lines with Mass Flow Controller
1 Purge line
Pumping system – Dry vacuum pump 1000 L/min
Controller – Win10 LTSC PC with fieldbus
21″ Touchscreen
Proprietary SCI software
Facilities – Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications – CE, S2, S8, Cleanroom ISO7 (10k)
Options – Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
