Description

FOUP (200mm / 8 inch)

200mm FOUP is able to protect, deliver and store 200mm wafer, provide safe protection during delivery and storage.
It reduces particle contamination of wafer, protect wafer from static electricity damage and then increase yield rate.
Support AMHS function, size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution.

Product Specifications:

● Product name：FOUP
● Part number：CK213
● Dimension：252.5(L) x 224.2(W) x 213(H)mm
● Weight：2930g
● Capacity：13 pcs
● Apply for round wafer：200mm(8 inch)Wafer
● Material：Customized
● Slot pitch：12.7 mm