Description
Easy NanoScan 20S
- Compact
- Ground
- Floor SEM
Easy NanoScan 20S Specification Details Magnification 20X ~ 300,000X Resolution 3nm with SE detector Acceleration Voltage 200V ~ 30kV Continuously Adjustable Detector SE, BSE (Optional) Electron Gun Precentered Tungsten Filament Objective IRIS 4-step Variable Aperture (20/20/50/100µm) Image Shift ±50µm Stage Manual 3-Axis stage (X,Y: 40mm / Z: 5~45mm), Manual (T: -20°~90° / R: 360°) Optional Stage Motorized 3-Axis stage (X,Y: 90mm / Z: 5~60mm), Manual (T: -20°~90° / R: 360°) Automatic Function Auto Focus, Auto Brightness / Contrast, Auto Gun alignment Maximum Sample Size Horizontal: 96mm / Vertical: 45mm Display Mode Focus Mode Focus Mode 320 x 240 pixel, Resizable Preview Mode 800 x 600 pixel Slow Mode Applicable to both preview and focus mode Photo Mode Up to 3200 x 2400 Image Format JPG / TIFF / BMP Image Storage Pixel 940×705 pixel / 1024×768 pixel / 1664×1248 pixel / 3200×2400 pixel Vacuum System Automated Evacuation System
Turbo molecular pump (Vacuum ready within 3 minutes)
Rotary vane pump
Electrical valve system (compressor NOT required)Vacuum Mode High Vacuum Mode (< 9×10⁻³ Pa) / Charge Reduction Mode Working Distance 5~45mm EDS Oxford, Bruker, EDAX, Thermo compatible Optional Devices EBSD
WDS
CL
Chamber Camera
LaB6/CeB6 Upgrade
3D Imaging
Raman Spectroscopy
E-beam LithographyDimension (mm) 600(W) x 623(D) x 1350(H) mm Weight 130kg