Description
Product Specifications
Machine type – High-power standalone batch plasma cleaner
Footprint – 1138W x 1811L x 1469H mm
Plasma chamber configuration – 1 large holder
Max product size – 420W X 430L X 40 mm
Min product size – N/A
Plasma generator – 600W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines – 2 Process gas lines with Mass Flow Controller
1 Purge line
Pumping system – Dry vacuum pump 1000 L/min
Controller – Win10 LTSC PC with fieldbus
21″ Touchscreen
Proprietary SCI software
Facilities – Single phase 110-240V 50/60 Hz
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications – CE, S2, S8, Cleanroom ISO7 (10k)
Options – Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
