Description
WIS8000 is designed with 2 standard load ports to accommodate FOUP, FOSB for 300mm wafer size, and open cassette for 200mm wafer size. This system is able to be upgraded up to 3 load ports. WIS8000 comes with a robotic arm to ensure fast and precision during the wafer handling and a wafer gripper module to hold the wafer during the macro inspection. The macro inspection platform comes with tilting capability for wafer front & backside inspection. The system is also equipped with a micro inspection platform, including a high-power microscope that can store up 5 objective lenses and a programmable XY stage with auto/manual indexing capability.
Product Specifications
-
Designed for 200mm and 300mm Wafers
-
Comes with 2x Hirata FOUP Ports that can accommodate FOUP/FOSB Ports
-
Need Hirata Adapter for 8” Open Cassette
-
R-Theta Wafer Handling System
-
Hirata Wafer Pre-Aligner (8” & 12” wafers)
-
Programmable Motorized stage with Vacuum chuck
-
Wafer Mapping system
-
Anti-Vibration Isolation Platform
-
IOSS WID120 OCR reader
-
TCP-IP & RS232 Data Interfaces
