Description
Aeon-HP is a high-performance, table-top batch plasma cleaning system which has been designed to perform higher power plasma processes in a consistent and continuous matter.
Aeon-HP has integrated temperature monitoring as well as a specially designed heat dissipation system allowing to perform long, high-power processes in a continuous manner.
Because of these characteristics, Aeon-HP can be used for all the standard plasma cleaning and activation applications, such as:
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Plasma cleaning before wire-bonding on modules
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Plasma cleaning before transfer molding on modules
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Plasma cleaning before under-fill
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Plasma cleaning on PCBs, BGA substrates
Aeon-HP can be used also for more intense processes:
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Plasma etching on various organic surfaces
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Polymer cross-linking applications
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Oxide removal on metal parts with oxide thickness in the micrometer region
Aeon-HP serves a specific range of applications within the Semiconductors, Automotive and Electronics industries where continuous high-power delivery is necessary.
Product Specifications
Machine type – High-power table-top batch plasma cleaner
Footprint – 575W x 936L x 862H mm
Plasma chamber configuration – 1 powered electrode and 1 ground electrode, multiple height positions
Max product size – 294W x 327L X 84H mm
Min product size – N/A
Plasma generator – 600W RF Generator 13.56 MHz
Automatic tuning system
Gas Lines – 2 Process gas lines with Mass Flow Controller
Pumping system – Dry vacuum pump 250 L/min
Controller – Win10 LTSC PC with fieldbus
16″ Touchscreen
Proprietary SCI software
Facilities – Single phase 110-240V 50/60 Hz, 2.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD
Certifications – CE, S2, S8, Cleanroom ISO7 (10k)
Options – Purge line
600 L/min dry vacuum pump
Kit for using pure hydrogen and hydrogen generator
