QML-4CI

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Description

QML-4CI is a four-lane inline plasma cleaning system which has been designed to sustain all the demands of a 24/7 continuous inline production environment where large-scale production volumes are top priority.

 

QML-4CI main advantage is its two independent plasma chambers. Each plasma chamber can accommodate the loading and unloading of two carriers at the same time in one movement; the total four carriers in the machine are then processed in parallel guaranteeing a high throughput production.

QML-4CI conveyors systems can be configured to accept one or two carriers from the upstream conveyor at once as well as providing one or two carriers to the downstream system at once.

Advanced traceability options are available on this system to easily integrate with a variety of Manufacturing Execution Systems (MES).

In manufacturing, QML-4CI is typically used for:

  • Plasma cleaning before wire-bonding on modules

     
  • Plasma cleaning before transfer molding on modules

     
  • Plasma cleaning on PCBs, BGA substrates

     

QML-4CI has been used in a range of applications within the Semiconductors and Automotive industries.

Product Specifications

Machine type   –  Four-Lane Inline Plasma Cleaner

Footprint   –  1380W x 2560L x 1636H mm

Plasma chamber configuration  –  Two plasma chambers each containing two carriers

Max product size  –  Carrier: 170W x 315L x 35H mm (customizable)

Min product size  –  Carrier: 35W x 100L x 1H mm (customizable)

Plasma generator  –  Double 600W RF Generator 13.56 MHz
Automatic tuning system

Gas Lines  –  2 Process gas lines with Mass Flow Controller

Pumping system  –  Double dry vacuum pump 1000 L/min

Controller  –  Win10 LTSC PC with fieldbus
16″ Touchscreen
Proprietary SCI software

Facilities  –  Three phase 380-415V 50/60 Hz, 15.5KVA
CDA 5 to 6 bar
Process gas pressure 0.5 to 1.5 bar
Exhaust port 25 mm OD

Certifications  –  CE, S2, S8, Cleanroom ISO7 (10k)

Options  – Kit for using pure hydrogen and hydrogen generator
Dry vacuum pump 1670 L/min
Traceability package
ISO5 (100) Cleanroom compatibility
Purge line