Description
Single-Wafer Automatic High Vacuum Oven
Small baking equipment, the maximum temperature of 250 ℃, using vacuum and nitrogen function combined to create oxygen-free, single bake a piece of wafer, suitable for small batch applications. Typical applications for this system include SOG annealing, copper annealing, aluminum annealing, low-k dielectric annealing and photoresist baking, drying and so on.
Brief Introduction | Product
Small baking equipment, the maximum temperature of 250 ℃, using vacuum and nitrogen function combined to create oxygen-free, single bake a piece of wafer, suitable for small batch applications. Typical applications for this system include SOG annealing, copper annealing, aluminum annealing, low-k dielectric annealing and photoresist baking, drying and so on.
- Compatible vacuum and environmental controls
- Operating vacuum range 1Pa – 10–4Pa, ultimate vacuum 10-5pa.
- Low residual O2 (<5ppm).
- Operating temperature range room temperature +25°C -250°C.
- Easy operation, fixed value operation, program operation, fast auto-stop operation, auto-stop operation, auto-start operation.
- Temperature control is PID mode touch screen instrument, single point type or program temperature control, can be calculated automatically, and display PV/SV at the same time, point touch setting, with memory function (e.g. temperature, time).
- Complex programs can be run according to technical requirements.
- With self-diagnostic circuit (temperature sensing abnormality, heater disconnection, automatic over-rise prevention, SSR short circuit), over-rise preventer, leakage protection switch to prevent over-current, key locking and other safety functions.
- Vacuum control mode automatic control, reach the vacuum degree to stop vacuuming, below the lower limit of automatic start, so the cycle of work, constant temperature time is completed, stop working; manual pressure less inflation or nitrogen filling.
Basic configuration and working principle of the system | Product
2.1 Control mode:
create an oxygen-free environment by vacuuming and nitrogen-filled cycle, and arrange heating components on the outer wall of the oven, and heat the inside of the oven by radiant heating to achieve the purpose of oxygen-free and dust-free baking.
2.2 Number of chambers
| Component | Specifications | Quantity |
| Vacuum Chamber | Working size：W400mm*H60mm*D400mm | 1 |
2.3 Vacuum conditions
- Limit vacuum: 1Pa – 10–4Pa.
- Requirement of pumping speed: the vacuum degree of the chamber should be 10–4Pa in 25min.
2.4 Heating system & dust-free grade
- Temperature range: Normal temperature +25℃-250℃.
- Within 30 minutes from room temperature to 200 ℃;
- Using water-cooled cooling, cooling rate of 40min or less from room temperature down to within 60 ℃;
- Temperature control accuracy ± 1 ℃, temperature uniformity ± 2% ℃;
- Dust-free grade: Class 100;
2.5 Protection measures:
The device real-time display and record the temperature and vacuum of each chamber, and can query historical data and export data, historical data not less than 30 days;
2.6 Software function:
- Chamber for opening and closing the door, heating and vacuum function control
- With bar code and cavity binding performance, response to the baking data for binding, and storage
- The bar code is entered manually or sent by the system communication at a later stage
- Equipment working status display, alarm information display
- Recipe setting, calling and storing, checking the temperature curve and temperature time record, vacuum status record, fault record, operation record, etc
- Authority hierarchical management (three levels: operator, engineer, administrator)
2.7 Safety Configuration
Overall electrical and mechanical safety design, in line with SEMI standards.
- Interlocking
- Emergency Stop Switch EMS
- Safety
- Protection measures
Control system | Product
The control system adopts touch screen control panel and programmable controller (PLC). It can realize the central integrated control of all electrical components, and has two control modes: manual and automatic.
The control system can realize the monitoring and control of the vacuum degree and temperature information of each chamber, and realize the automatic inflation and deflation of each chamber. The whole control system is installed in the main cabinet, which is convenient for operation.
Equipment Installation Conditions | Product
- Floor space – estimated 1200*1500*1200(W*H*D)mm
- Power supply – 380V, 50Hz, 9Kw, three-phase five-wire
- Nitrogen – inlet quick connector 10mm, min. 40L/min, gas pressure 0.3-0.5Mpa, purity 99.999%, clean nitrogen does not contain particulate matter
- Cold water – flow 20L/min, caliber 1/2 inch outer wire, drainage needs to be smooth without pressure discharge.
- Exhaust gas – baking hot exhaust gas exhaust, pipe diameter 60mm;
- Weight estimate – 350KG
- Grounding – shell protective grounding resistance ≤ 1Ω
- Unloading – the demand side is responsible for unloading and equipment in place to unpack the box
- Installation environment – clean plant clean grade Class10000, ambient temperature – 20 ~ 30 ℃, ambient humidity – ≤ 85% R.H. No flammable, explosive substances around, no strong vibration, no strong electromagnetic field, no high concentration of powder and corrosive substances, no direct sunlight or other direct heat radiation. The equipment should be placed horizontally in a well-ventilated test room, leaving at least 1.5 meters of space around for maintenance.
Technical Information | Product
- Technical data: Chinese version of the data booklet (paper + electronic files, including instruction manuals, daily maintenance guidelines, electrical schematic diagrams).
- Inspection report: factory inspection report (paper, including detailed parameter indicators and actual data)
