Description
Wafer SMIF Pod – 150mm(6 inch)
Wafer SMIF Pod – 150mm(6 inch)
Wafer SMIF Pod is able to load Cassette with wafers inside, provide protection to wafers during delivery and storage between process and process. Size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution, which can be used in SEMI Auto ALU Automatic Machine.
Product Specifications:
● Product name：Wafer SMIF Pod
● Part number：WSP150
● Dimension：230(L) x 214.5(W) x 201.2(H)mm
● Weight：2297.5g
● Capacity：1 Set 6” Wafer Cassette
● Apply for round wafer：150mm(6 inch)
● Material：PC/PC ESD
